MOCVD Growth of Compositionally Graded BaxSr1-xTiO3 Thin Films

Abstract

This paper describes an MOCVD technique for producing both monolithic and compositionally graded BaxSr1-xTiO3 (BST) thin films for tunable RF device applications. Specifically, we describe a “multiple injection flash evaporation” technique, which can easily produce BST thin films with a wide variety of compositional grading and dopant profiles. Preliminary results show the films to have excellent voltage standoff properties and tunability of dielectric permittivity. These materials are presently being used in the development of tunable RF filters for communication and radar applications.