Abstract
The mobilities of the ions SF2+, SF3+, SF4+, SF5+, and S2F7+ in SF6 gas have been measured using an electrical shutter method with an electron ionization ion source. Measurements were made at gas temperatures of 22–36 °C over a range of E/N, the ratio of electric field strength to gas number density, from 55–550 Td (1 Townsend (Td)=10−17 V cm2) and over the pressure range 0.1–0.7 Torr. The zero-field reduced mobilities of SF2+, SF3+, SF4+, SF5+, and S2F7+ were determined to be 0.64, 0.61, 0.64, 0.65,and 0.48 cm2 V−1 s−1, respectively.
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