Abstract
One of the most crucial issues encountered in the implementation of sputtered solid lubricant coatings at an industrial scale is the non-uniformity of properties achieved on complex 3D components. This is due to the fact that compositional variations are unavoidable on these complex parts. This limitation can only be overcome if a system is developed which can present consistent sliding properties despite of chemical composition variations. To address this crucial issue, in this work, for the first time DC sputtered Mo-Se-N coatings are explored. The coatings were deposited in a semi-industrial setup with different chemical compositions. All coatings were rather compact, X-ray amorphous and had maximum hardness of ∼5 GPa. During the tribological testing in ambient air at room temperature, all coatings displayed consistent and similar friction coefficient and specific wear rates, showing their high potential to be used for the depositions on 3D parts.
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