Abstract
Almost all of the vacuum sensors using in the semiconductor production equipment are the diaphragm vacuum sensor. Recently, vacuum sensor has a problem such as breakdown with high corrosion process gas. In this research, we fabricate a novel diaphragm vacuum sensor which has high corrosion resistance and extensive measurement region. The high corrosion resistance is realized using Ru-based thin film metallic glass (Ru_<65>Zr_<30>Al_5). Using this material we fabricated a novel vacuum sensor with high corrosion resistance. The extensive measurement region is simulated with the conical base electrode shape on the sensor substrate. Now we are designing and fabricating the sensor.
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