Mn-doped 0.15BiInO3-0.85PbTiO3 piezoelectric films deposited by pulsed laser deposition

Abstract

Undoped, 0.5 and 1.0 mol. % Mn-doped 0.15BiInO3-0.85PbTiO3 films were grown on PbTiO3/Pt/Ti/SiO2/Si substrates by pulsed laser deposition. Phase-pure perovskite films were obtained at a substrate temperature of 585 °C irrespective of Mn doping level. The 0.5 mol. % Mn-doped films showed a room temperature permittivity of 480 and a dielectric loss tangent of 0.015 at 100 kHz after 650 °C post-deposition annealing. The coercive field and remanent polarization were 80 kV/cm and 29 µC/cm2, respectively. The ferroelectric transition temperature of the films ranged from 535 to 585 °C. The e31,f piezoelectric coefficient was −7.1 C/m2. X-ray diffraction and phase transition temperature data showed that the Mn atoms substitute on the Ti-site as Mn3+; the resulting films have p-type conduction characteristics.