Mixed phase iron oxides thin layers by atmospheric-pressure chemical vapor deposition method

Abstract

This paper provides a simple method for producing a metal oxide thin layer methodology by atmospheric pressure chemical vapor deposition (APCVD) synthesis over stainless steel substrates. This methodology enables the formation of thin iron oxide layers at its performance at various temperatures of 330 °C, 430 °C, and 530 °C. The deposition arises from thermal decomposition of the iron organometallic precursor Fe3(CO)12, forming a thin layer of iron oxide is, by the ozone present in the reaction chamber promoting the deposition of the iron oxide particles over the substrate. The Raman characterization suggest that at 330 °C, a mixture of hematite and magnetite is predominant on the as deposited substrates, also hematite modes show to be more pronounced as the band at 300 cm-1 narrows. Conversely, magnetite is prominent at higher synthesis temperatures, exhibiting a more intense Eg5 mode at 680 cm-1. The particles exhibit a uniform morphology, with both metal oxide phases coexisting. The average diameter of the particles is 50 nanometers as scanning electronic microscopy shows in a transversal sample section.•The formation of particles is attributed to the combination of iron ions +2 and +3 in the deposition process and their interaction with oxygen in the given synthesis parameters at atmospheric pressure chemical vapor deposition (APCVD).