Mixed LTCC and LTTT Technology for Microplasma Generator Fabrication

Abstract

An issue of paramount importance for the fabrication of microplasma devices is internal structure flatness. To overcome this problem we devised a fabrication method using LTCC (Low Temperature Cofired Ceramic) and LTTT (Low Temperature Transfer Tape) technologies. The flexibility resulting from mixing these technologies could enable fabrication of certain microfluidic applications. In the present work, the fabrication of a microplasma generator using a mixed LTCC and LTTT technology is presented. Silver-palladium electrodes were screen printed on the green tapes and were cofired after machining of microchannels and other structures. Two electrode plates were obtained separately in this way using a setter powder sheet to ensure flatness. In the postfire process, transfer tapes were used to bind the two electrode plates and the electrode spacer together to make the final device structure. Uniform and stable glow discharges were obtained in argon, nitrogen, oxygen, and sulfur hexafluoride gases. Paschen's curves, V-I characteristics, and optical emission spectra were obtained in DC discharges. The fabrication method presented has been demonstrated to be very reproducible and produced very flat electrodes.