Miscut measuring of SrTiO3 single crystal using high resolution X-ray diffraction

Abstract

Strontium titanate (SrTiO3) is one of the perovskite type metal oxides with multifunctional properties and it has a lot of applications in various sectors of technology. Inthis paper, we obtained the miscut angles from Bragg peak after performing ω scans ofHRXRD at different angles of φ with intervals of 90○. The obtained results locatedbetween 0.2015○ and 0.4302○ using two ways (mathematically and Epitaxy software),which is considered as a tolerance limit (less than 1°) to cut the substrates.