Abstract

Soft X-ray line emission of pulse electron-cyclotron-resonance (ECR) discharge in Argon sustained by a powerful beam of millimeter waves in a mirror magnetic trap was investigated. An X-ray spectrum in the range of 6–17 nm has been obtained, and the absolute spectral intensity of radiation in this range has been determined. It was shown that such a discharge is an effective source of soft X-ray radiation with an approximately 10% conversion efficiency of microwaves into X-rays and a spectral power maximum of 7.3 kW/nm at a wavelength of 9 nm.

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