Abstract
The surface micro-deformation of reflector mirrors in the solid-state laser cavity caused by machining accuracy is a key factor affecting the maximum beam quality. The effects of resonator mirror deformation on maximum laser beam quality were calculated in this study as per the perturbation theory of quantum mechanics, wherein mirror deformation is regarded as a perturbation in the light-field motion equation. The maximum beam quality was about 1.26 and 1.06 when the machining accuracy was λ/10 and λ/20, respectively. The influence of mirror deformation on the maximum beam quality is only related to mirror machining accuracy; it is independent of the laser beam radius or random distributions and directions of mirror deformation.
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