Abstract
A thin film solid state electrochemical gas sensor has been investigated for CO 2 detection based on the cell reaction Na + + OH − + CO 2 = NaHCO 3. The galvanic cell arrangement is Au¦Na x CoO 2 − δ (ref)¦NASICON¦Au, SnO 2 with the right-hand electrode being exposed to CO 2 and O 2. Polished NASICON pellets of 300–500 μm thickness have been employed as well as electrolytes and substrates. The Na x CoO 2 − δ reference material, Au leads and a catalytic SnO 2 film were deposited by rf-sputtering. For electrical insulation and encapsulation, the reference side of the sensor has been covered by a thin film of SiO 2 − x N y . On top of this thin insulating layer a thin Pt film and an integrated Pt-Pt/Rh thermocouple have been deposited also by rf-sputtering for heating the device and for temperature measurement, respectively.
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