Abstract
Utilization of 100 MHz drive frequency miniaturized a surface acoustic wave (SAW) motor down to 3x12.5x2.5 mm3. A slider fabricated with hemispheric projections enabled the 100 MHz frequency drive. Despite the diminutive size of the actuator, the miniaturized SAW motor performed up to 0.3 m/s high speed and 13 mN high output force.
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