Abstract

This paper presents a compact substrate integrated waveguide (SIW) sensor combining slow-wave and air-filled technologies for humidity environment detection. Designed in a multilayer printed-circuit-board process, the proposed sensor operates at 5.8 GHz, in the industrial, scientific and medical (ISM) frequency band. Since the permittivity of the air depends on its relative humidity, the detection is obtained by measuring the resonant frequency shift of a SIW resonator. Whereas air-filled technology allows improving sensitivity detection, slow-wave effect allows both concentrating the electric field in the air and reducing the size of the sensor. Hence, a surface area reduction of the resonator cavity of 41% and 75% is obtained as compared to the partially air-filled SIW and the fully air-filled SIW, respectively. A good agreement between the numerical EM simulation and the experimental result without humidity variation is obtained. Moreover, thanks to the concentration of the electric field in the air region of the cavity, simulation results show that a sensor sensitivity of 973 kHz/RH can be expected. It allows validating the interest of combining slow-wave SIW and air-filled technology for humidity sensing application.

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