Abstract
We introduce the concept of a miniaturized compound refractive X-ray zoom lens consisting of SU-8 lenses fabricated by deep X-ray lithography. The focal length can be varied by changing the number of lens elements placed in the beam. We use suitable actuators to move single lens elements reversibly out of the beam. The X-ray zoom lens can accept different X-ray energies while keeping a fixed working distance, or vary the focal distance for a fixed energy. The latter is useful in tuning the magnification factor in full field microscopy.
Highlights
Compound Refractive X-ray Lenses (CRLs) are well established optics for hard X-rays for photon energies above about 10 keV
We introduce the concept of a miniaturized compound refractive X-ray zoom lens consisting of SU-8 lenses fabricated by deep X-ray lithography
In this paper we present a new X-ray zoom lens for imaging e.g. in full field microscopy which is based on CRLs made from SU-8 resist by deep X-ray lithography
Summary
Compound Refractive X-ray Lenses (CRLs) are well established optics for hard X-rays for photon energies above about 10 keV They consist of a large number of focusing lens elements, first described in [1, 2]. A typical change in lens configuration is performed in about 30 s All these devices with changeable focal length are used for beam conditioning. If the same sample shall be examined with different energies in the same setup, the software of the zoom lens controller will calculate the necessary focal length and the best lens configuration will be set automatically. The zoom lens can be configured for line or point focus, or even astigmatic geometry to compensate for asymmetrical source dimensions, and thereby achieve a more roundish focal spot on a sample
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