Abstract
Monitoring of gas composition for processes in the mTorr range is not possible with a conventional residual gas analyzer (RGA) unless a pressure reduction pumping system is used. A miniature sensor, having dimensions compatible with the mean-free path of gas molecules can operate directly at mTorr pressures while being less expensive and more compact than a conventional apparatus. This article describes a quadrupole RGA which is scaled down by a factor of 7 to operate at pressures up to 10 mTorr. This sensor requires different construction methods and drive electronics than a traditional RGA. A unique ion source with high output has been developed. The small sensor has resolution characteristics very similar to standard size models but sensitivity is reduced in proportion to the ratio of cross-sectional area for each quadrupole r0. Response is linear to the mTorr range and a correction method for gas scattering, based on pressure measured by a total pressure gauge included in the ion source design, extends the linear response to 10 mTorr.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have