Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam

Liuchao Zhang,Han Zhang,Weiyi Ma,Jie Hu,Lan Jiang,Yi Jiang

doi:10.1515/ntrev-2019-0028

Liuchao Zhang, Han Zhang + Show 4 more

Open Access

https://doi.org/10.1515/ntrev-2019-0028

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Journal: Nanotechnology Reviews	Publication Date: Nov 26, 2019
Citations: 15	License type: CC BY 4.0

Affiliation: Beijing Institute of Technology

Abstract

Abstract An on-fiber extrinsic Fabry–Perot interferometric (EFPI) vibration sensor based on micro-cantilever beam is proposed and experimentally demonstrated. The micro-cantilever beam, with a cantilever length of 80μm and a cantilever thickness of 5μm, is created perpendicular to the fiber axis by using the femtosecond laser micro-machining technique. The on-fiber vibration sensor has same diameter with that of the single mode fiber. An acceleration sensitivity of 11.1 mV/g@300 Hz in the range of 0.5-5g is demonstrated experimentally. This on-fiber and micro-cantilever beam design allows for the sensor to be smaller size and higher temperature resistance.

Highlights

Vibration sensors have found wide applications in many areas such as in structural health monitoring [1], inertial navigation [2], earthquake monitoring [3] and even biomedicine [4]
An on-fiber extrinsic Fabry–Perot interferometric (EFPI) vibration sensor based on micro-cantilever beam is proposed and experimentally demonstrated
We present an on-fiber EFPI vibration sensor with a micro-cantilever beam fabricated by a femtosecond laser

Summary

Introduction

Vibration sensors have found wide applications in many areas such as in structural health monitoring [1], inertial navigation [2], earthquake monitoring [3] and even biomedicine [4]. Fiber Bragg grating (FBG)-based vibration sensors are considered to have good sensitivity and unique multiplexing capability [10, 12, 13] Their sensor dimensions and the instability under high temperature have limited their applications. Fabry–Pérot interferometer (FPI)based vibration sensors have played a dominant role due to their capacity for miniature size and high stability [14,15,16,17,18,19]. These vibration sensors typically utilize a sensor head that carries an extrinsic Fabry–Pérot interferometric (EFPI) structure and a cantilever beam or support beam. While the FSL micromachining technique is not as accurate as the FIB processing technique, it shows higher efficiency and lower costs [19]

Fabrication procedure of the sensor

Design of the sensor structure

Experimental setup

Time response and frequency response of the sensor

Acceleration response of the vibration sensor

Conclusion