Abstract
The results of testing a new miniature accelerated ion source (KLAN-10M) with a plasma neutralizer are reported. In particular, the operating modes of the source are studied, and the dependences of the ion-beam diameter and the ion current distribution along the output aperture surface on distance are measured. The ion current density with an output-aperture diameter of 7 mm (flat ion optics) is 10.4 mA/cm2, which allows one to precisely correct local errors in the surface shape of the optical components at a low beam divergence (≈15%). The operation of the plasma neutralizer is studied, the resulting electronic current of which provides, for this design, incomplete compensation of the space charge in a beam (the neutralizer current is 10 times less than the current of ions).
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
