Abstract
High sensitivity fiber optic pressure sensor is in great demand in in all aspects due to its advantages. However, the current high sensitivity optical fiber pressure sensor has the problems of large size and high cost. An optical fiber pressure sensor based on all-silica Fabry-Perot interference has been proposed in this paper. The sensor consists of single mode fiber, silica capillary and diaphragm made of coreless optical fiber. The diameter of the sensor is only 125 μm. With precise control of diaphragm thinning, the diaphragm thickness of F-P sensor is only 1.477 μm, the sensor manufactured in this way has sensitivity with 12.586 rad/MPa. The sensor is ease of manufacturing and low cost. Static calibration shown the advantages of the sensor are high sensitivity, good linearity, repeatability, reliability and low hysteresis.
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