Abstract
Diamond is a good candidate for harsh environment sensing due to its high melting temperature, Young’s modulus, and thermal conductivity. A sensor made of diamond will be even more promising when combined with some advantages of optical sensing (i.e., EMI inertness, high temperature operation, and miniaturization). We present a miniature diamond-based fiber optic pressure sensor fabricated using dual polymer-ceramic adhesives. The UV curable polymer and the heat-curing ceramic adhesive are employed for easy and reliable optical fiber mounting. The usage of the two different adhesives considerably improves the manufacturability and linearity of the sensor, while significantly decreasing the error from the temperature cross-sensitivity. Experimental study shows that the sensor exhibits good linearity over a pressure range of 2.0–9.5 psi with a sensitivity of 18.5 nm/psi (R2 = 0.9979). Around 275 °C of working temperature was achieved by using polymer/ceramic dual adhesives. The sensor can benefit many fronts that require miniature, low-cost, and high-accuracy sensors including biomedical and industrial applications. With an added antioxidation layer on the diamond diaphragm, the sensor can also be applied for harsh environment applications due to the high melting temperature and Young’s modulus of the material.
Highlights
Interest in the use of miniature fiber-optic pressure sensors for medical and industrial applications has progressively increased over recent decades
The calibration was performed in sensor air cavity length with respect to the pressure changes
The calibration was performed in aa pressure range the pressure range was chosen to be psi pressure range of of 22 to to9.5
Summary
Interest in the use of miniature fiber-optic pressure sensors for medical and industrial applications has progressively increased over recent decades. An extrinsic Fabry–Perot (FP) cavity is formed at the tip of an optical fiber by using the end of the optical fiber surface and a reflective miniature diaphragm built on a support structure. There are two different categories of materials for fiber optic sensors that make use of extrinsic FP cavity structure. The first category is ceramic materials (e.g., fused silica, silicon, zirconia, etc.) [4,11,17,18,19,20].
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