Miniature 60-GHz-band bandpass filter with 2.55-dB insertion-loss using standard 0.13 µm CMOS technology

Abstract

In this paper, we demonstrate a miniature low-insertion-loss 60-GHz-band bandpass filter by standard 0.13 µm CMOS technology. Low-insertion-loss is achieved by adopting thick microstrip-line (MSL) with optimized ground-plane pattern as the needed inductors to minimize the metal and substrate loss. This filter achieved insertion-loss (1/S 21 ) lower than 3 dB over the frequency range of 56.9–68.6 GHz, input return loss (S 11 ) better than −10 dB over the frequency range of 53.4–71.9 GHz, and output return loss (S 22 ) better than −10 dB over the frequency range of 53.2–70.9 GHz, and small group-delay-variation of ±3.25 ps over the frequency range of 52–72 GHz.The minimum insertion-loss was 2.55 dB at 62.5 GHz. To the authors' knowledge, this is the best result ever reported for a 60-GHz-band CMOS bandpass filter in the literature. The chip area was only 0.175×0.194 mm2, i.e. 0.034 mm2, excluding the test pads.