Abstract
This paper reports mini piezoelectric power device with multi-frequency response, which works as a power generator under a mechanical vibration environment. It has a 0.192 mm thick PZT-5A piezoelectric bulk film on a 0.1 mm thick Invar42 metal plate, which has a good performance for thermal treatment process. The maximum output power in the C123 cantilever, which has electrically connected in parallel with C1, C2 and C3 cantilevers, is 162 μW at 113 Hz with input drive of 5g acceleration. The output AC voltage of mini piezoelectric power generator is 19.7 V p−p and load impedance is 150kΩ at 113 Hz with input drive of 5g. The acquired device performance was tested by using B&K vibration exciter 4808. Additionally, we demonstrated LED lighting test, which works as a mini piezoelectric power generator under device was mounted on the vacuum pump, which excited ±5 g acceleration.
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