Abstract
In this article, we design a MIM waveguide-coupled resonator system. This resonant cavity has a semicircular ring cavity with the square cavity (SRSC). The effect of that Fano phenomenon on this sensing property on this system is explained in detail by using the finite different time domain method and finite element analysis method. This sensor was analyzed by COMSOL Multiphysics 5.4a simulation software to explore the influences of the structural arguments to the sensitivity. After structure optimization, a sensitivity of the sensor can reach 1640 nm/RIU, and the figure of merit (FOM) of this system is 41. This has great application prospects in the field of integrated optical circuits and biosensing.
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