Abstract
This chapter discusses the millimeter-wave effect on sintering of silicon nitrides by 28GHz millimeter-wave (mm-wave) radiation. Microwave heating is expected to be an energy-saving and low-emission process for ceramics sintering because of its process-time reduction by its volumetric heating. However, popularly used 2.45GHz microwave heating presents a problem of cracking in ceramics, because it often induces a large temperature gradient due to non-uniform distribution of the electric field in the process chamber as well as the large temperature dependence of dielectric loss of various dielectric materials. 28GHz mm-wave heating suppresses the thermal-runaway. Due to its shorter wavelength, 28GHz millimeter-wave apply a uniform electric field distribution in a cylindrical cavity with a diameter of about l m and a length of about l m, and it brings smaller temperature dependence of the dielectric loss of the various materials.
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