Abstract
Ferroelectric loaded line phase shifters operating at millimeter waves for phased array antenna applications are presented. Phase shifters were manufactured on using Ba0.3Sr0.7TiO3 thin films. The magnetron sputtering process was used to fabricate these Ba0.3Sr0.7TiO3 ferroelectric films with a thickness ∼1 μm. The phase shifter operating at V-band (60 GHz) demonstrated continuous phase shift up to 220 deg and figure of merit (FOM) 22 deg/dB. The phase shifter operating at Ka-band (30 GHz) showed phase shift up to 360 deg and FOM 40 deg/dB.
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