Abstract
In this paper, a compact branch line coupler fabricated on a GaAs substrate using surface micromachining. It is composed of a dielectric-supported air-gapped microstrip line (DAML) structure, which is a low-loss transmission line with an air-post and is useful for integration with other micro electro-mechanical system (MEMS) and/or MMIC components. The size reduction of the branch line coupler is accomplished by the insertion of metal–air–metal (MAM) capacitors within the structure. The coupler shows an isolation characteristic of approximately 21 dB and differences in magnitude and phase of less than 0.3 dB and 2°, respectively.
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