Millimeter-Wave Bandpass Filters Using On-Chip Dual-Mode Resonators in 0.13-μm SiGe BiCMOS Technology

Abstract

A novel on-chip dual-mode resonator (OCDMR) is proposed for the design of millimeter-wave (mm-wave) bandpass filters (BPFs). The proposed OCDMR consists of a stub-loaded metallic line and two identical open-end lines, which are extended and bent in opposite directions for coupling to the input and output ports. The two resonant frequencies of OCDMR can be independently adjusted by changing geometric parameters. To clarify the working mechanism of OCDMR, an LC equivalent circuit is constructed to imitate the resonant characteristics of OCDMR, which is calculated and analyzed in detail. Then, using the proposed OCDMRs, three different on-chip mm-wave BPFs with multiple transmission zeros (TZs) are designed and fabricated using 0.13- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu$</tex-math> </inline-formula> m SiGe BiCMOS technology. Good agreement between simulations and measurements validates the feasibility of OCDMR for applications in the on-chip mm-wave BPFs.