Abstract
Chip-scale sensors were demonstrated using mid-Infrared (mid-IR) photonic circuits consisting of aluminum nitride (AlN) waveguides. The AlN were grown by DC sputter, which exhibited a broad transmittance from λ = 0.5 μm to λ = 8 μm through the FTIR characterization. A sharp and stable fundamental mode over 2.4–2.8 μm mid-IR spectrum was observed without any distortion and scattering. Real-time detection of water was conducted by measuring the intensity attenuation of the waveguide light at λ = 2.7 μm for its characteristic -OH stretch absorption. With the advantages of broad mid-IR transparency, the AlN sensor platform will enable integrated photonics remote monitoring.
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