Abstract
Mid-Spatial Frequency (MSF) Wavefront Error of optics divided into the PSD-1 and PSD-2 ranges plays an important role in the performance of high power laser systems. The present work focuses on the PSD-2 range in terms of short ripples which haven’t been well studied in the literature. Characteristics and origins of these short ripples were detailed, whereafter small tool computer controlled polishing (CCP) and conventional full aperture polishing experiments were conducted on fused silica. It is revealed that PSD2 error is independent of the main process parameters including lap rotating rate and polishing pressure in continuous polishing and tool path pitch and crossfeed velocity in small tool CCP processes. Whereas the type of polishing lap has a decisive effect on PSD2 error of the optics. The pitch lap shows superiority in restraint of short ripples over polyurethane pad. By introducing diamond conditioner for dressing polyurethane pad, the PSD2 error has been greatly decreased.
Highlights
The wavefront quality of the optics used in high power lasers is specified over a continuous range of spatial frequencies from 1×102 to 2.5×10−3 mm−1 [1]
It is well known that the power spectral density (PSD)-1 error, in terms of long ripples, is intensively correlative to computer controlled polishing (CCP) processes characterized by a small tool [5]
It is revealed that the Rms values over the PSD-2 range keeps at ~0.72 nm for variable polishing pressures
Summary
The wavefront quality of the optics used in high power lasers is specified over a continuous range of spatial frequencies from 1×102 to 2.5×10−3 mm−1 [1]. It is well known that the PSD-1 error, in terms of long ripples (i.e., waves), is intensively correlative to CCP processes characterized by a small tool [5]. This error is mainly affected by the initial surface error distribution (spatial and frequency domain), the removal function characters (profile, removal efficiency and stability) and the adopted paths [6, 7]. PSD-2 error of these prepared fuse silica have been measured and analyzed
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