Abstract
This paper presents a complementary split ring resonator (CSRR) based sensor for non-contact microwave surface resistance/resistivity characterization of bulk conductors. Through full-wave simulations, we observed the dependence of |S 21 | of CSRR on surface resistance/resistivity of bulk conductor which is placed on top of the CSRR. Results show that the resonant frequency of the CSRR decreases monotonously with increasing surface resistance/resistivity. Experiments were performed with a CSRR resonating at around 1.9 GHz. Artificially roughened Aluminum plates were used as proof-of-principle samples. Surface resistance/resistivity of these samples was also measured using traditional cylindrical cavity resonator. Preliminary results show that it is possible to characterize surface resistance/resistivity using CSRR. The proposed sensor has the following advantages: low cost, non-contact and high spatial resolution.
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