Abstract
Thick film gas sensors based on ZnO nanopowders were fabricated by using microwave sintering. The surface and cross section morphologies were characterized by field-emission scanning electron microscopy (FE-SEM). The stability of the microstructure was studied by impedance spectroscopy. The results showed that the shape of the nanoparticles was not changed through microwave sintering, and the thick films had the more dense microstructures than that by muffle oven sintering. The resistance–temperature characteristic and the responses to toluene, methanol and formaldehyde revealed that the microwave sintering technique could effectively control the growth of ZnO nanoparticles, realize the uniform sintering of thick film, gain the stable microstructure and improve the response of sensor. In addition, the formative mechanism of the thick film microstructure was proposed according to microwave sintering mechanism.
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