Abstract
Compositionally graded ferroelectric thin films have execellent dielectric properties and abnormal ferroelectric properties which can be used in various microelectronic devices. Compositionally graded (BaSr)TiO 3 [BST] thin films were prepared on MgO substrates by pulsed laser deposition. The crystalline orientation and microstructure of graded BST thin films were studied using x-ray diffraction, scanning electron microscopy. The microwave properties of the graded BST films were investigated as a function of the direction of composition gradient with respect to substrate. Also, we report on the fabrication and performance of coplanar ferroelectric phase shifters. Coplanar waveguide(CPW) type phase shifters have been fabricated on the graded BST/MgO using Au/Cr metal electrodes. The phase shifters were tested at frequencies up to 20 GHz
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