Abstract
400nm thick AgTa 0.5 Nb 0.5 O 3 (ATN) films have been sintered by pulsed laser deposition technique on LaAlO 3 (001), sapphire (A1 2 O 3 -0112, r-cut) single crystal substrates and Coming 7059 Glass. Photolithography and metal lift-off technique were used to fabricate tunable Coplanar Waveguide Interdigital Capacitors (CPWIDCs). On-wafer test of varactors was performed with microwave network analyzer and G-S-G microwave probe. ATN/LaAlO 3 capacitors demonstrated the highest tunability (5.8%@20GHz), ATN/Glass showed the best flat dispersion (3.90%) and ATN/ A1 2 O 3 showed the lowest loss tangent (0.06@20GHz) in the microwave range from 1 to 40 GHz.
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