Abstract
Hydrogen plasma using electron cyclotron resonance (ECR) technique is produced and is studied in a small linear system for breakdown parameters. Microwave power in the experimental system is delivered by a magnetron at 2.45 GHz for 30 ms during which the breakdown of neutral gas occurs. The axial magnetic field required for ECR in the system is such that the fundamental ECR surface (B = 875 G) resides at the geometrical centre of the plasma system. ECR breakdown parameters such as plasma delay and plasma decay time are observed from plasma density measurements, carried out at the centre of plasma system using a specially designed Langmuir probe. The operating parameters such as working gas pressure (10−5–10−2 mbar) and input microwave power (160–800 W) are varied and the corresponding effect on the breakdown parameters is observed and the parameter space for operating the pulsed experimental system has been identified. All the relevant experimental results obtained are presented.
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