Microwave plasma spray in application to process microwave Ferrite films

Abstract

A newly developed microwave torch is presented which produces high temperature plasma, The torch is designed to process ferrite films by microwave plasma spray, The impedance matching of this torch is improved when the plasma of the oxygen and argon gas is generated in a proper ratio, The torch has no electrodes, thus it generates pure plasma. The microwave properties of the ferrite films (CaVIG ferrite) deposited by the plasma spray is nearly equal to that of bulk.