Abstract
The effect of mechanical polishing on the surface topography of mono-and polycrystalline diamond films produced by microwave plasma deposition and synthetic diamond crystals is investigated. The values of the temperature and friction coefficient of diamond films during polishing on the cast iron disk are measured. After finishing treatment, the surface roughness of a single crystal diamond is ∼0.5 nm and that of a polycrystal one is ∼8.1 nm. Because of the difference in wear rate of misoriented crystallites in the diamond film, nanosteps are formed on the grain boundaries.
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