Abstract
Abstract As a low temperature preparation method of Bi, Sr, Ca, and Cu oxide and fluoride films, microwave plasma of Ar and O2 gases was applied to decompose Bi(C6H5)3 and metal β-diketone complexes. As-deposited crystalline Bi2O3, CuO, SrF2, and CaF2 films were obtained at a substrate temperature of 400°C and below. The film thickness was nearly proportional to the deposition time for each film. These Bi2O3, SrF2, CuO, and CaF2 crystalline films designed to have a 2000A thickness each were stacked and annealed at 850°C for 30min to show a superconductivity with TC onset at 65K.
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