Abstract
Indium-tin oxide (ITO) is widely used as a transparent electrode for optoelectronic devices given its large transparency and high conductivity. However, the particular properties of this material greatly depend on the overall fabrication process. We report on the effect of four different postfabrication processes on ITO thin films grown by electron beam evaporation. More specifically, the effect on the overall properties of the evaporated ITO thin films of microwave plasma annealing, rapid thermal processing, and the two processes combined were analyzed. In particular, the morphological, chemical, optical, and electrical properties of the annealed ITO thin films were studied. The experimental results show that the ITO thin films can be turned from opaque to transparent, and their conductivity can be improved by one order of magnitude depending on the particular postfabrication process.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
