Abstract

, , compounds on GaAs substrates are important materials that are used as Schottky layers in microwave transistors. This study systematically explores the electrical characteristics of various enhancement-mode pseudomorphic high electron mobility transistors (E-mode pHEMTs) with , , Schottky layers. These E-mode pHEMTs were fabricated using a high-selectivity succinic acid solution for gate recess and buried-Pt gate technology. The E-mode pHEMT has a Schottky diode turn-on voltage of . The corresponding values for and E-mode pHEMTs are 0.72 and , respectively. Because a larger can be obtained at the interface, the E-mode pHEMT also more effectively confined carriers and yielded a higher sheet charge density than other Schottky materials. Based on these measured results, this E-mode pHEMT is more appropriate for microwave low-noise and high-power device applications.

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