Abstract
A microwave ion source with a permanent magnet solenoid has been developed as an ion source for industrial applications. The microwave ion source with a permanent magnet solenoid was designed and fabricated. It was installed in the experimental test setup with a 2-kW, 2.45-GHz RF generator. An argon plasma was generated easily without any ignition method, and argon ion beams, up to 7 mA with a 600-W RF power and a 40-kV extraction voltage, have been extracted.
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