Microwave field-effect transistors based on group-III nitrides

Abstract

A concept for the design of experimental AlGaN/GaN/AlGaN double heterostructures with a two-dimensional electron channel are discussed, together with their main properties. The structures were formed by ammonia molecular-beam epitaxy on sapphire substrates. The foundations for postgrowth technology are developed for microwave field-effect transistors based on Group-III nitrides, including the formation of a mesa isolation and the preparation stage of nonrectifying contacts and the Schottky barrier. The first field-effect transistors fabricated based on the above heterostructures have a complete set of static characteristics and can operate in a mode of weak microwave signals at a frequency of 8.15 GHz.