Microwave discharges: generation and diagnostics

Abstract

Microwave discharges are widely used for generation of quasi-equilibrium and nonequilibrium plasma for different applications. Microwave plasma can be generated at pressures from 10−5 Torr up to atmospheric pressure in the pulse and continuum wave regimes at incident powers ranged between several Watts and hundreds of kW. The plasma absorbed power can be high enough and runs up to 90% of the incident power. This paper reviews the methods of microwave plasma generation, general features of microwave plasma, and selected aspects of microwave plasma diagnostics.