Abstract
Low temperature co-fired glass-ceramic-Ag metal electrode systems were investigated in relation to Ag diffusion and micro structural development during firing. Sintering temperature was in a range of 800°C-900°C. At lower temperature of 800°C, Ag ion was diffused through in the LTCC substrates. However, Ag diffusion was not observed at 850°C below. Simultaneously, the densification of the electrode was greatly improved. With increasing sintering temperature, glass-ceramic to the electrode does not occur due to increase of the densification of the sample. The glass-ceramics exhibited good dielectric properties: εr=7.74, tanδ=0.7×10-3 at 850°C for 0.5h.
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