Abstract
The microwave-assisted titanium nitride (TiN) coating method using TiN powders as a raw material was investigated for hard and smooth TiN coatings by decreasing the energy of the exothermic reaction between the raw powder and air. A titanium-aluminum-vanadium alloy (Ti-6Al-4 V) substrate was buried in TiN powders and irradiated with 2.45 GHz microwaves using a multimode cavity. After microwave processing, TiN films were found to be successfully deposited on the Ti-6Al-4 V substrate without atmospheric control. X-ray diffraction results indicated that face-centered cubic (fcc)-TiN phase increased with increasing temperature. TiN coating films synthesized at 900 °C and 800 °C were smoother than those at 1000 °C. Besides, the TiN films synthesized at 900 °C exhibited 697 HV with arithmetic mean roughness (Ra) = 0.29. These results demonstrated that a hard and smooth TiN film can be obtained using TiN powders as raw materials.
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