Abstract
A sol was spun on single crystal silicon substrates at a spin-rate of 3000-5000 rpm followed by a low temperature cure to form a stable sol-gel/ silicon structure. Good quality crystalline HA films of thickness ~300-400 nm were obtained by anneal- ing the sol-gel/Si structure in a conventional cavity applicator microwave system with a magnetron power of 1300 W, frequency of 2.45 GHz, and at a low processing temperature of 425 � C for annealing times ranging from 2-60 min. X-ray Diffraction and FTIR analysis confirmed that the crystalline quality of the thin films were comparable or better than those heat-treated under the same processing condi- tions (temperature and time) in a Rapid Thermal Annealing (RTA) system. The RBS data suggests a composition corresponding to stoichiometric hydroxyapatite Ca10(PO4)6(OH)2, the major inor- ganic component of bone. The results showed that the HA film thickness decreases with increasing sol spin-rate. The HA films showed good biocompati- bility because little monocyte adhesion occurred and hence no inflammatory response was activated in vitro. The potential of microwave annealing for rapid and low temperature processing of good crystalline quality HA thin films derived from sol-gel is dem- onstrated.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
