Abstract
Microsystems represent a new class of systems which differ from classical technical systems by the fact that they use microfabrication technologies for their manufacturing. Such technologies comprise all the possibilities available for the fabrication of microelectronic, micromechanical and microoptical components as well as technologies for system integration. The further development of microsystems in the next few years will be characterized by consistent utilization of the available technologies, an increase in their complexity, and the development of efficient design tools.
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