Microstructures replication using high frequency excitation

Abstract

The focus of the paper is dynamic investigation and practical application of two different vibroactive pads: concentrator type vibroactive pad and vibroactive pad with spring, whose purpose is improve the quality of microstructure, created by the method of hot imprint. The goal is to find out operating frequencies of vibroactive pads, where the entire operating surface vibrates with equal displacements, since only then even impact of vibration excitation for microstructure could be obtained. Three types of investigation are employed during the vibroactive pads analysis: numerical simulation by using Comsol Multiphysics 3.5a. software static analysis and piezo solid frequency response modes, in order to find out whether the constructions are capable to vibrate at desired mode; after numerical simulation experimental analysis with holographic interferometry system PRISM is performed, in order to experimentally spot at this vibration mode; and finally vibrometer Polytec is being used to find out the amplitudes of vibration and in the same time to make sure, that vibroactive pads develop the same mode under hot imprint experimental conditions, i.e. when particular mechanical load is applied. Finally experiments of mechanical hot imprint are performed in order to see how newly created vibroactive pads are suitable for the process. The novelty of the paper is that the devices are being numerically and experimentally analysed, when they are under the action of mechanical load, this provides more accuracy to analysis and its results, allows avoid presumptions, based only on numerical simulation with applied mechanical load.