Abstract

A series of TiVN and TiVCN nano-composite films with different V and C con- tents were synthesized using a multi-target magnetron sputtering technique. The microstructures, mechanical properties and friction properties at different test temperatures were investigated by X-ray diffraction, nano-indentation, CSM high-temperature ball-on-disc tribo-meter and SEM-EDS analy- sis. The results showed that the hardness values of the TiVN and TiVCN films reached maximum of 25.02 GPa and 28.51 GPa at a V target power of 60 W and C target power of 20 W, respectively. With the further increase of C, however, the hardness of TiVCN films decreased gradually. At room temper- ature, the friction coefficient of the TiVCN film decreased with the increase power of C target. At high temperature, the friction coefficient of the TiVCN showed a up-down-up curve with the increase of test temperature. The effects and adaptive mechanisms of Magneli phase formed in the TiVCN films at high temperature were discussed.

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