Microstructures Manufactured in Diamond by Use of Laser Micromachining.

Mariusz Dudek,Witold Szymański,Martin Sharp,Adam Rosowski,Marcin Kozanecki,Anna Karczemska,Malwina Jaszczak

doi:10.3390/ma13051199

Abstract

Different microstructures were created on the surface of a polycrystalline diamond plate (obtained by microwave plasma-enhanced chemical vapor deposition—MW PECVD process) by use of a nanosecond pulsed DPSS (diode pumped solid state) laser with a 355 nm wavelength and a galvanometer scanning system. Different average powers (5 to 11 W), scanning speeds (50 to 400 mm/s) and scan line spacings (“hatch spacing”) (5 to 20 µm) were applied. The microstructures were then examined using scanning electron microscopy, confocal microscopy and Raman spectroscopy techniques. Microstructures exhibiting excellent geometry were obtained. The precise geometries of the microstructures, exhibiting good perpendicularity, deep channels and smooth surfaces show that the laser microprocessing can be applied in manufacturing diamond microfluidic devices. Raman spectra show small differences depending on the process parameters used. In some cases, the diamond band (at 1332 cm−1) after laser modification of material is only slightly wider and shifted, but with no additional peaks, indicating that the diamond is almost not changed after laser interaction. Some parameters did show that the modification of material had occurred and additional peaks in Raman spectra (typical for low-quality chemical vapor deposition CVD diamond) appeared, indicating the growing disorder of material or manufacturing of the new carbon phase.

Highlights

Diamond can be considered as a very interesting material for biomedical applications, because of its excellent properties such as the highest known thermal conductivity, biocompatibility, chemical inertness and transparency to light
We focused on finding the best parameters to cut diamond and next to form different structures on the surface of diamond plate
According to the presented results, the laser micromachining of the MW PECVD diamond surface allows for the formation of a groove with excellent shape:

Summary

Introduction

Diamond can be considered as a very interesting material for biomedical applications, because of its excellent properties such as the highest known thermal conductivity, biocompatibility, chemical inertness and transparency to light. It is interesting for microfluidic devices manufacturing [1,2]. Many potential applications of diamond are limited by the difficulties in its processing. One of the most interesting ways of shaping diamond is with the use of laser micromachining. The modification of diamond at very specific points of the sample gives the possibility of new applications.

Methods

Results

Conclusion