Abstract
Co3Pt films were deposited on Pt underlayers with various thicknesses by conventional sputtering in order to investigate the effect of Pt underlayers and annealing temperatures on their microstructure and the magnetic properties. From XRD and HRTEM analysises, as annealing at 300°C, a well epitaxial growth of Co3Pt (002) on Pt (111) underlayer that leads the film to present perpendicular magnetic anisotropy. However, Pt atoms in the Pt underlayer will diffuse seriously into Co3Pt layer as the annealing temperature is increased to 375°C that changes the compositions to approach equiatomic CoPt, and showing in-plane magnetic anisotropy with soft magnetic properties.
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