Abstract
In the last years metallic magnetic calorimeters (MMC) showed an energy resolution of a few eV for x-rays up to 10 keV. This makes MMCs a promising and powerful tool for many applications where photons or energetic massive particles have to be detected—like absolute activity measurements of radioactive isotopes, high resolution x-ray spectroscopy and x-ray fluorescence material analysis. However, in order to fulfill all requirements of these applications and to allow to reach the maximum resolving power a consequent micro-fabrication of the MMC detectors is needed. The micro-fabrication of metallic magnetic calorimeters requires reliable deposition and patterning processes for niobium structures with high critical currents and for paramagnetic sensors.
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